Department of Microelectronics
Faculty of Electrical Engineering, Mathematics, and Computer Science

MSc M. Ghaderi

Postdoc
Electronic Instrumentation (EI), Department of Microelectronics

PhD thesis (Jun 2016): Airgap-based MEMS optical filters: For the ultraviolet-visible spectrum
Promotor: Albert Theuwissen, Reinoud Wolffenbuttel

Expertise: Optical MEMS sensors

Biography

Amir was born in Birjand, Iran, in 1986. He got his bachelor degree in 2008 from Birjand University in applied physics. In 2011, he received his masters at Shahid Beheshti University where he was a research assistant in Micro-optics laboratory working on polymeric MEMS devices.

Publications

  1. Exploring the response of a resistive soot sensor to AC electric excitation
    L.M. Middelburg; M. Ghaderi; D. Bilby; J.H. Visser; R.F. Wolffenbuttel;
    Journal of Aerosol Science,
    2020. DOI: 10.1016/j.jaerosci.2020.105568

  2. Maintaining Transparency of a Heated MEMS Membrane for Enabling Long-Term Optical Measurements on Soot-Containing Exhaust Gas
    Luke M. Middelburg; Mohammadamir Ghaderi; David Bilby; Jaco H. Visser; GuoQi Zhang; Per Lundgren; Peter Enoksson; Reinoud F. Wolffenbuttel;
    MDPI Sensors,
    Volume 20, 2020. DOI: 10.3390/s20010003

  3. Infrared absorbance of vertically-aligned multi-walled CNT forest as a function of synthesis temperature and time
    Amir Mirza Gheytaghia; Amir Ghaderi; Sten Vollebregt; Majid Ahmadic; Reinoud Wolffenbuttel; GuoQi Zhang;
    Materials Research Bulletin,
    2020. DOI: 10.1016/j.materresbull.2020.110821

  4. Impedance Spectroscopy for Enhanced Data Collection of Conductometric Soot Sensors
    Middelburg, L. M.; Ghaderi, M.; Bilby, D.; Visser, J. H.; GuoQi Zhang; Wolffenbuttel, R. F.;
    In IEEE 29th International Symposium on Industrial Electronics (ISIE),
    pp. 1099-1103, 2020. DOI: 10.1109/ISIE45063.2020.9152484

  5. Self-Cleaning Micro-Windows for In-Tailpipe Optical Exhaust Gas Measurements
    Ghaderi, A.; Middelburg, L. M.; Bilby, D.; Visser, J. H.; Lundgren, P.; Enoksson, P.; Wolffenbuttel, R. F.;
    In IEEE 29th International Symposium on Industrial Electronics (ISIE),
    pp. 1104-1108, 2020. DOI: 10.1109/ISIE45063.2020.9152437

  6. MEMS for biofuel composition measurement based on thermal impedance spectroscopy
    Ghaderi, Mohammadamir; Jiang, Bo; Bossche, Andre; Visser, Jaco H; Wolffenbuttel, Reinoud F;
    Sensors and Actuators B: Chemical,
    Volume 277, pp. 281--288, December 2018. DOI: 10.1016/j.snb.2018.08.098
    Abstract: ... Continuous monitoring of the composition of E85 biofuel is essential for a quick start and clean and efficient operation of Flex-Fuel Vehicles. The actual ethanol concentration in E85 fuel is in the range 50%–85% and fuel-line sensors are used for ethanol-gasoline composition measurement. However, also a small amount of water is typically present, which cannot be reliably detected using state-of-the-art capacitive fuel-line sensors. Thermal impedance spectroscopy has been investigated as a non-destructive technique to determine the composition of ternary mixtures of biofuels. The principle of the thermal conductivity detector has been extended for measuring both the thermal conductivity and the thermal capacity of biofuel in the range up to 10 kHz using an AC-operated polysilicon heater for injecting a sinusoidal heat flux, and another polysilicon strip at a well-defined spacing or thermopile sensors for measuring the in-phase and quadrature components of the resulting AC temperature difference. Measurements on the components are in reasonable agreement with simulations, with a −3 dB cut-off frequency at 422.5 Hz and 340.8 Hz for ethanol and gasoline, respectively. However, the cut-off frequency of water was found to be significantly lower than simulations due to its high surface tension, thus limiting access to the detector.

  7. Multi-domain spectroscopy for composition measurement of water-containing bio-ethanol fuel
    L.M. Middelburg; G. de Graaf; A. Bossche; J. Bastemeijer; M. Ghaderi; F.S. Wolffenbuttel; J. Visser; R. Soltis; R.F. Wolffenbuttel;
    Fuel Processing Technology,
    Volume 167, pp. 127-135, 2017. DOI: 10.1016/j.fuproc.2017.06.007
    Abstract: ... Measuring the ethanol/water ratio in biofuel of high ethanol content, such as E85, is important when used in a flex-fuel engine. A capacitive probe is generally used for measuring the ethanol/gasoline ratio. However, the water content in E85 biofuel cannot be disregarded or considered constant and full composition measurement of biofuel is required. Electric impedance spectroscopy with a customized coaxial probe operating in the 10 kHz to 1 MHz frequency range was investigated. An in-depth investigation of the electrical impedance domain has led to the conclusion that additional information is required to unambiguously determine the composition of the ternary biofuel mixture. Among the different options of measurement domains and techniques, optical absorption spectroscopy in the UV spectral range between 230 and 300 nm was found to be the most appropriate. The typical absorbance in the UV range is highly dominated by gasoline, while ethanol and water are almost transparent. This approach is experimentally validated using actual fuels.

  8. Fabrication Tolerance Sensitivity in Large-Area Mid-Infrared Metamaterial Absorbers
    Mohammadamir Ghaderi; Ehsan Karimi; N. Pelin Ayerden; Reinoud F. Wolffenbuttel;
    Proceedings,
    Volume 1, Issue 4}, ARTICLE NUMBER = {328, 2017. DOI: 10.3390/proceedings1040328
    document

  9. Multi-domain spectroscopy for composition measurement of water-containing bio-ethanol fuel
    L.M. Middelburg; G. de Graaf; A. Bossche; J.Bastemeijer; M. Ghaderi; F.S. Wolffenbuttel; J. Visser; R. Soltis; R.F. Wolffenbuttel;
    Fuel Processing Technology,
    Volume 167, pp. 127-135, 2017.

  10. Combining impedance spectroscopy with optical absorption spectroscopy in the UV for biofuel composition measurement
    L. Middelburg; M. Ghaderi; A. Bossche; J. Bastemeijer; G. de Graaf; R.F. Wolffenbuttel; R. Soltis; J. Visser;
    In Instrumentation and Measurement Technology Conference (I2MTC), 2017 IEEE International,
    IEEE, IEEE, pp. 1-6, 05 2017. DOI: 10.1109/i2mtc.2017.7969676
    Abstract: ... A capacitive probe is generally used in a flex-fuel engine for measuring the ethanol content in biofuel. However, the water content in biofuel of high ethanol content cannot be disregarded or considered constant and the full composition measurement of ethanol, gasoline and water in biofuel is required. Electrical impedance spectroscopy with a customized capacitive probe operating in the 10 kHz to 1 MHz frequency range is combined with optical absorption spectroscopy in the UV spectral range between 230 and 300 nm for a full composition measurement. This approach is experimentally validated using actual fuels and the results demonstrate that electrical impedance spectroscopy when supplemented with optical impedance spectroscopy can be used to fully determine the composition of the biofuel and applied for a more effective engine management. A concept for a low-cost combined measurement system in the fuel line is presented.

  11. Microstructure for Thermal Impedance Spectroscopy for Biofuel Composition Measurement
    B. Jiang; M. Ghaderi; A. Bossche; J.H. Visser; R.F. Wolffenbuttel;
    In Multidisciplinary Digital Publishing Institute Proceedings,
    pp. 396, 2017. DOI: 10.3390/proceedings1040396
    Abstract: ... Thermal impedance spectroscopy has been investigated as a non-destructive technique to determine the composition of ternary mixtures of biofuels. The principle of the thermal conductivity detector has been extended for measuring both the thermal conductivity and the thermal capacity of biofuel in the range between 1 to 100 Hz, using an AC-operated polysilicon heater for injecting a sinusoidal heat flux, and another polysilicon strip at a well-defined spacing or thermopile sensors for measuring the in-phase and quadrature components of the resulting AC temperature difference.

  12. Fabrication and characterization of MEMS airgap-based optical filters for the UV spectral range
    M. Ghaderi; R. F. Wolffenbuttel;
    In 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS),
    pp. 1959-1962, June 2017. DOI: 10.1109/TRANSDUCERS.2017.7994453
    Keywords: ... micromechanical devices;optical filters;reflectivity;silicon compounds;MEMS airgap-based optical filters;airgap Bragg reflectors;fill-factor;membrane materials;nitride layers;optical characterization;reflectance;silicon oxide layers;silicon technology;spectral reflectance;ultraviolet spectral range;Optical device fabrication;Optical filters;Optical reflection;Optical refraction;Optical variables control;Reflectivity;Airgap optical filters;Distributed Bragg reflector;Optical MEMS;Optical bandwidth;UV filters;UV spectral range.

  13. A photonic microsystem for hydrocarbon gas analysis by mid-infrared absorption spectroscopy
    N. P. Ayerden; J. Mandon; M. Ghaderi; F. J. M. Harren; R. F. Wolffenbuttel;
    In 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS),
    pp. 1052-1055, Jan 2017. DOI: 10.1109/MEMSYS.2017.7863593
    Keywords: ... Bragg gratings;gas sensors;infrared spectroscopy;light absorption;light reflection;micromechanical devices;optical filters;absorption path;effective optical absorption path length;functional integration;gas-filled LVOF;high-order filter operation;highly reflective Bragg mirror;hydrocarbon gas analysis;light source;linear variable optical filter;midinfrared absorption spectroscopy;on-chip gas absorption microspectrometer;photonic microsystem;physical path length;single MEMS device;tapered cavity;Absorption;Cavity resonators;Mirrors;Optical filters;Optical reflection;Optical resonators;Resonator filters.

  14. Combining impedance spectroscopy with optical absorption spectroscopy in the UV for biofuel composition measurement
    Luke Middelburg; Mohammadamir Ghaderi; Andre Bossche; Jeroen Bastemeijer; Ger de Graaf; Reinoud Wolffenbuttel;
    In Instrumentation and Measurement Technology Conference (I2MTC), 2017 IEEE International,
    2017.

  15. Micro thermal conductivity detector with flow compensation using a dual MEMS device
    G. de Graaf; A.A. Prouza; M. Ghaderi; R.F. Wolffenbuttel;
    Sensors and Actuators A: Physical,
    Volume 249, pp. 186-198, 2016.

  16. A miniaturized optical gas-composition sensor with integrated sample chamber
    Ayerden, N. Pelin; Ghaderi, Mohammadamir; Enoksson, Peter; de Graaf, Ger; Wolffenbuttel, Reinoud F.;
    Sensors and Actuators B: Chemical,
    Volume 236, pp. 917-925, 2016.

  17. Thermal annealing of thin PECVD silicon-oxide films for airgap-based optical filters
    M. Ghaderi; G. de Graaf; R.F. Wolffenbuttel;
    Journal of Micromechanics and Microengineering,
    Volume 26, Issue 8, pp. 084009, 2016.

  18. NBI Optical Filters in Minimally Invasive Medical Devices
    M.F. Silva; J.A. Rodrigues; M. Ghaderi; L.M. Goncalves; G. de Graaf; R.F. Wolffenbuttel; J.H. Correia;
    IEEE Journal of Selected Topics in Quantum Electronics,
    Volume 22, Issue 4, pp. 1-7, 2016.

  19. Fabrication of Ultrathin Large-area Dielectric Membrane Stacks for use as Interference Filters
    M. Ghaderi; G. de Graaf; R.F. Wolffenbuttel;
    In Procedia Engineering (Proceedings of the 30th Eurosensors Conference), vol. 168,
    Elsevier, pp. 1342-1345, 2016.

  20. Implementation of CMOS-compatible Metamaterial Absorber for gas Sensing Application
    E. Karimi Shahmarvandi; M. Ghaderi; P. Ayerden; G. de Graaf; R.F. Wolffenbuttel;
    In Procedia Engineering (Proceedings of the 30th Eurosensors Conference), vol. 168,
    Elsevier, pp. 1241-1244, 2016.

  21. Optical Spectroscopy for Biofuel Composition Sensing
    L.M. Middelburg; G. de Graaf; M. Ghaderi; A. Bossche; J.H. Bastemeijer; J.H. Visser; R.F. Wolffenbuttel;
    In Procedia Engineering (Proceedings of the 30th Eurosensors Conference), vol. 168,
    Elsevier, pp. 55-58, 2016.

  22. CMOS-compatible metamaterial-based wideband mid-infrared absorber for microspectrometer applications
    Karimi Shahmarvandi, Ehsan; Ghaderi, Mohammadamir; Ayerden, N. Pelin; de Graaf, Ger; Wolffenbuttel, Reinoud F.;
    In Proceedings of SPIE Photonics Europe, vol. 9883,
    SPIE, pp. 988309-988309-9, 2016.

  23. Design and fabrication of 45° inclined mirrors for wafer-level optical absorption spectroscopy
    N.P. Ayerden; M. Ghaderi; R.F. Wolffenbuttel;
    In Journal of Physics: Conference Series (Proceedings of the 27th Micromechanics and Microsystems Europe Workshop), vol. 757,
    IOP Publishing, pp. 012018, 2016.

  24. Analysis of the effect of stress-induced waviness in airgap-based optical filters
    M. Ghaderi; E.K. Shahmarvandi; G. de Graaf; R.F. Wolffenbuttel;
    In Proceedings of SPIE Photonics Europe, vol. 9889,
    SPIE, pp. 98890A-98890A, 2016.

  25. Design and fabrication of ripple-free CMOS-compatible stacked membranes for airgap optical filters for UV-visible spectrum
    M. Ghaderi; G. de Graaf; R.F. Wolffenbuttel;
    In Proceedings of SPIE Photonics Europe, vol. 9888,
    SPIE, pp. 98880R-98880R-8, 2016.

  26. Design and fabrication of ultrathin silicon-nitride membranes for use in UV-visible airgap-based MEMS optical filters
    M. Ghaderi; R.F. Wolffenbuttel;
    In Journal of Physics: Conference Series (Proceedings of the 27th Micromechanics and Microsystems Europe Workshop), vol. 757,
    IOP Publishing, pp. 012032, 2016.

  27. CMOS-compatible fabrication of metamaterial-based absorbers for the mid-IR spectral range
    E.K. Shahmarvandi; M. Ghaderi; R.F. Wolffenbuttel;
    In Journal of Physics: Conference Series (Proceedings of the 27th Micromechanics and Microsystems Europe Workshop), vol. 757,
    IOP Publishing, pp. 012033, 2016.

  28. Optical Spectroscopy for Biofuel Composition Sensing
    L.M. Middelburg; G. de Graaf; M. Ghaderi; A.Bossche; J. Bastemeijer; J.H. Visser; R.E. Soltis; R.F. Wolffenbuttel;
    In Procedia Engineering (Eurosensors 2016),
    pp. 55-58, 2016.

  29. Airgap-based MEMS optical filters for the ultraviolet-visible spectrum
    M. Ghaderi;
    PhD thesis, Delft University of Technology, June 2016.

  30. Minimizing stress in large-area surface micromachined perforated membranes with slits
    M. Ghaderi; N.P. Ayerden; G. de Graaf; R.F. Wolffenbuttel;
    Journal of Micromechanics and Microengineering,
    Volume 25, Issue 7, pp. 1-9, 2015.

  31. A miniaturized optical sensor with integrated gas cell
    N.P. Ayerden; M. Ghaderi; G. de Graaf; R.F. Wolffenbuttel;
    In G Urban; J Wöllenstein; J Kieninger (Ed.), Procedia Engineering (Proceedings of the 29th Eurosensors Conference), vol. 120,
    Elsevier, pp. 392-395, 2015.

  32. Vapour HF release of airgap-based UV-visible optical filters
    M. Ghaderi; N.P. Ayerden; G. de Graaf; R.F. Wolffenbuttel;
    In G Urban; J Wöllenstein; J Kieninger (Ed.), Procedia Engineering (Proceedings of the 29th Eurosensors Conference), vol. 120,
    Elsevier, pp. 816-819, 2015.

  33. Optical characterization of MEMS-based multiple air-dielectric blue-spectrum distributed bragg reflectors
    M. Ghaderi; N.P. Ayerden; G. de Graaf; R.F. Wolffenbuttel;
    In R Brama; JL Sánchez-Rojas (Ed.), Proceedings of SPIE Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, vol. 9517,
    SPIE, pp. 95171M-1-9517, 2015.

  34. Optical design and characterization of a gas filled MEMS Fabry-Perot filter
    N.P. Ayerden; M. Ghaderi; G. de Graaf; R.F. Wolffenbuttel;
    In JL Sanchez-Rojas; R Brama (Ed.), Proceedings of SPIE Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, vol. 9517,
    SPIE, pp. 95171N-95171N-8, 2015.

  35. A MEMS flow compensated thermal conductivity detector for gas sensing
    G. de Graaf; A. Abarca; M. Ghaderi; R.F. Wolffenbuttel;
    In J Wollenstein (Ed.), Procedia Engineering (Proceedings of the 29th Eurosensors Conference), vol. 120,
    Elsevier, pp. 1265-1268, 2015.

  36. Optomechanical characterization of annealed thin PECVD oxide membranes
    M. Ghaderi; G. de Graaf; R.F. Wolffenbuttel;
    In RJ Wiegerink; D Tsoukalas; U. Staufer (Ed.), Proceedings of the 26th Micromechanics and Microsystems Europe workshop,
    2015.

  37. Design, fabrication and characterization of infrared LVOFs for measuring gas composition
    M. Ghaderi; N.P. Ayerden; A. Emadi; P. Enoksson; J.H. Correia; G. de Graaf; R.F. Wolffenbuttel;
    Journal of Micromechanics and Microengineering,
    Volume 24, Issue 8, pp. 1-8, 2014.

  38. Design, fabrication and characterization of LVOF-based IR microspectrometers
    N.P. Ayerden; M. Ghaderi; M.F. Silva; A. Emadi; P. Enoksson; J.H. Correia; G. de Graaf; R.F. Wolffenbuttel;
    In H Thienpont; J Mohr; H Zappe; H Nakajima (Ed.), Proceedings of SPIE Photonics Europe, vol. 9130,
    SPIE, pp. 91300T-91300T-1, 2014.

  39. Design and fabrication of multiple airgap-based visible filters
    M. Ghaderi; R.F. Wolffenbuttel;
    In H Thienpont; J Mohr; H Zappe; H Nakajima (Ed.), Proceedings of SPIE Photonics Europe, vol. 9130,
    SPIE, pp. 913005-913005-8, 2014.

  40. A blue optical filter for narrow-band imaging in endoscopic capsules
    M.F. Silva; M. Ghaderi; Luis Miguel Goncalves; G. de Graaf; R.F. Wolffenbuttel; J.H.G. Correia;
    In J Popp; VV Tuchin; DL. Matthews; FS Pavone (Ed.), Proceedings of SPIE Photonics Europe, vol. 9129,
    SPIE, pp. 912915-912915-8, 2014.

  41. A Lossy Fabry-perot Based Optical Filter for Natural Gas Analysis
    Ayerden, NP; Ghaderi, M; De Graaf, G; Wolffenbuttel, RF;
    In Procedia Engineering (Proceedings of the 28th Eurosensors Conference), vol. 87,
    Elsevier, pp. 1410-1413, 2014.

  42. Optical filter for providing the required illumination to enable narrow band imaging
    Silva, MF; Rodrigues, JA; Oliveira, MJ; Fernandes, AR; Pereira, S; Costa, CG; Ghaderi, M; Ayerden, P; Goncalves, LM; De Graaf, G; others;
    In Procedia Engineering (Proceedings of the 28th Eurosensors Conference), vol. 87,
    Elsevier, pp. 1414-1417, 2014.

  43. Surface-micromachined bragg reflectors based on multiple airgap/sio2 layers for cmos-compatible fabry-perot filters in the uv-visible spectral range
    Ghaderi, M; Ayerden, NP; De Graaf, G; Wolffenbuttel, RF;
    In Procedia Engineering (Proceedings of the 28th Eurosensors Conference), vol. 87,
    Elsevier, pp. 1533-1536, 2014.

  44. Optical filter for providing the required illumination to enable narrow band imaging
    M.F. Silva; J.A. Rodrigues; M.J. Oliveira; A.R. Fernandes; S. Pereira; C.G. Costa; M. Ghaderi; P. Ayerden; L.M. Goncalves; G. de Graaf; R.F. Wolffenbuttel; J.H. Correia;
    In Procedia Engineering (Proceedings of the 28th Eurosensors Conference), vol. 87,
    Elsevier, pp. 1414-1417, 2014.

  45. Fabrication, characterization, and simulation of a cantilever-based airflow sensor integrated with optical fiber
    M. Sadegh Cheri; H. Latifi; F. Beygi Azar Aghbolagh; R. Ranjbar Naeini; M. Taghavi; M. Ghaderi;
    Applied Optics,
    Volume 52, Issue 14, pp. 3420-3427, 2013. Harvest.

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Last updated: 27 Dec 2018

Mohammadamir Ghaderi

Alumnus